Vacuum diffusion pump oil, with its high vacuum acquisition capability and stable physical and chemical properties, is widely used in technical fields that require ultra-high vacuum environments. The following are the core application scenarios:
Material science and semiconductor manufacturing
In semiconductor chip manufacturing, it is used in process equipment such as thin film deposition, ion implantation, and lithography to avoid the influence of air impurities on chip purity and circuit accuracy.
Material surface modification and vacuum coating (such as optical coatings, conductive coatings) processes, maintaining a vacuum environment to ensure the adhesion and uniformity of the coating layer.
Vacuum metallurgy and heat treatment
In vacuum melting and vacuum brazing processes, it removes gas impurities from metal materials to enhance mechanical properties such as strength and toughness.
During metal vacuum heat treatment, it prevents oxidation and decarburization of the workpiece, ensuring the surface quality and dimensional accuracy of the treated workpiece.
Research instruments and analysis detection
In addition to electron microscopes, it is also applied in precision instruments such as mass spectrometers, electron spectrometers, and X-ray diffractometers, providing an interference-free vacuum environment for sample analysis.
In scientific research scenarios such as nuclear physics experiments and vacuum ultraviolet spectroscopy detection, constructing ultra-high vacuum to reduce the interference of environmental molecules on experimental results.
In the field of electronic devices and aerospace, in the manufacturing and packaging process of vacuum electronic devices (such as vacuum tubes, microwave tubes), it removes internal gases to extend the lifespan of the devices.
In the aerospace and aviation field, it is used for vacuum testing of spacecraft components and space environment simulation cabins, simulating the vacuum environment of space to verify the reliability of components.